On measuring the temperature coefficient of resistivity and the thermal expansion coefficient of conductive thin films

DOI zum Zitieren der Version auf EPub Bayreuth: https://doi.org/10.15495/EPub_UBT_00008841
URN to cite this document: urn:nbn:de:bvb:703-epub-8841-3

Title data

Fischerauer, Gerhard:
On measuring the temperature coefficient of resistivity and the thermal expansion coefficient of conductive thin films.
In: Thin Solid Films. Vol. 825 (2025) . - 140727.
ISSN 0040-6090
DOI der Verlagsversion: https://doi.org/10.1016/j.tsf.2025.140727

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Abstract

We analyze the details of extracting the temperature coefficient of resistivity and the thermal expansion coefficient of thin-film materials from the measured temperature coefficient of resistance of thin-film resistors on supporting substrates. It is shown that this requires two straining experiments, one thermal experiment, and the ability to deposit identical films on two different substrates with known properties. An analysis of experimental data from the literature, which includes the application of accepted rules from the Guide to the Expression of Uncertainty in Measurement (GUM), reveals that the violation of the stated requirements usually leads to inconsistent or arbitrary results.

Further data

Item Type:	Article in a journal
Keywords:	Thin films; temperature coefficient of resistivity; thermal expansion coefficient; electrical measurement; distinguishability
DDC Subjects:	600 Technology, medicine, applied sciences > 600 Technology 600 Technology, medicine, applied sciences > 620 Engineering
Institutions of the University:	Faculties Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Language:	English
Originates at UBT:	Yes
URN:	urn:nbn:de:bvb:703-epub-8841-3
Date Deposited:	02 Feb 2026 13:27
Last Modified:	02 Feb 2026 13:27
URI:	https://epub.uni-bayreuth.de/id/eprint/8841

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