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Tailored star-shaped statistical teroligomers via ATRP for lithographic applications

DOI zum Zitieren der Version auf EPub Bayreuth: https://doi.org/10.15495/EPub_UBT_00004763
URN to cite this document: urn:nbn:de:bvb:703-epub-4763-8

Title data

Wieberger, Florian ; Forman, Drew C. ; Neuber, Christian ; Gröschel, André H. ; Böhm, Marietta ; Müller, Axel H. E. ; Schmidt, Hans-Werner ; Ober, Christopher K.:
Tailored star-shaped statistical teroligomers via ATRP for lithographic applications.
In: Journal of Materials Chemistry. Vol. 22 (2012) Issue 1 . - pp. 73-79.
ISSN 0959-9428
DOI der Verlagsversion: https://doi.org/10.1039/c1jm11922b

Project information

Project title:
Project's official title
Project's id
Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern
SFB 481

Project financing: Deutsche Forschungsgemeinschaft

Abstract

series of five star-shaped teroligomers consisting of a saccharose core, and arms, composed of α-gamma butyrolactone methacrylate (GBLMA), methyl adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) with defined arm length and number of arms were prepared via the core-first atom transfer radical polymerization (ATRP) route. The saccharose core was modified with ATRP initiating sites and non-reactive sites, enabling the synthesis of star polymers with a smaller arm number but identical core. Star teroligomers were synthesized with narrow molecular weight distributions with low polydispersity indices (PDIs < 1.1) showing negligible side reactions only at higher conversions of Xp > 50%. The absence of side reaction and the precise achievement of the target molecular weight indicated excellent control over the reaction. A selected star-shaped teroligomer was investigated for the first time as a photoresist material. The delicate conditions of the lithographic process were optimized by a combinatorial approach. The obtained low line edge and line width roughness of the observed pattern demonstrate the potential of the star architecture for this application.

Further data

Item Type: Article in a journal
Additional notes (visible to public): ISI:000297598400009
DDC Subjects: 500 Science > 540 Chemistry
Institutions of the University: Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Former Professors > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Research Institutions > Central research institutes > Bayreuth Institute of Macromolecular Research - BIMF
Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern
Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Research Institutions
Research Institutions > Central research institutes
Research Institutions > Collaborative Research Centers, Research Unit
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Former Professors
Language: English
Originates at UBT: Yes
URN: urn:nbn:de:bvb:703-epub-4763-8
Date Deposited: 09 Sep 2020 09:57
Last Modified: 09 Sep 2020 09:57
URI: https://epub.uni-bayreuth.de/id/eprint/4763

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