URN to cite this document: urn:nbn:de:bvb:703-epub-4763-8
Title data
Wieberger, Florian ; Forman, Drew C. ; Neuber, Christian ; Gröschel, André H. ; Böhm, Marietta ; Müller, Axel H. E. ; Schmidt, Hans-Werner ; Ober, Christopher K.:
Tailored star-shaped statistical teroligomers via ATRP for lithographic applications.
In: Journal of Materials Chemistry.
Vol. 22
(2012)
Issue 1
.
- pp. 73-79.
ISSN 0959-9428
DOI der Verlagsversion: https://doi.org/10.1039/c1jm11922b
Project information
Project title: |
Project's official title Project's id Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern SFB 481 |
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Project financing: |
Deutsche Forschungsgemeinschaft |
Abstract
series of five star-shaped teroligomers consisting of a saccharose core, and arms, composed of α-gamma butyrolactone methacrylate (GBLMA), methyl adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) with defined arm length and number of arms were prepared via the core-first atom transfer radical polymerization (ATRP) route. The saccharose core was modified with ATRP initiating sites and non-reactive sites, enabling the synthesis of star polymers with a smaller arm number but identical core. Star teroligomers were synthesized with narrow molecular weight distributions with low polydispersity indices (PDIs < 1.1) showing negligible side reactions only at higher conversions of Xp > 50%. The absence of side reaction and the precise achievement of the target molecular weight indicated excellent control over the reaction. A selected star-shaped teroligomer was investigated for the first time as a photoresist material. The delicate conditions of the lithographic process were optimized by a combinatorial approach. The obtained low line edge and line width roughness of the observed pattern demonstrate the potential of the star architecture for this application.
Further data
Item Type: | Article in a journal |
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Additional notes (visible to public): | ISI:000297598400009 |
DDC Subjects: | 500 Science > 540 Chemistry |
Institutions of the University: | Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Former Professors > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt Research Institutions > Central research institutes > Bayreuth Institute of Macromolecular Research - BIMF Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern Faculties Faculties > Faculty of Biology, Chemistry and Earth Sciences Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I Research Institutions Research Institutions > Central research institutes Research Institutions > Collaborative Research Centers, Research Unit Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Former Professors |
Language: | English |
Originates at UBT: | Yes |
URN: | urn:nbn:de:bvb:703-epub-4763-8 |
Date Deposited: | 09 Sep 2020 09:57 |
Last Modified: | 09 Sep 2020 09:57 |
URI: | https://epub.uni-bayreuth.de/id/eprint/4763 |