Tailored star-shaped statistical teroligomers via ATRP for lithographic applications

Titelangaben

Wieberger, Florian ; Forman, Drew C. ; Neuber, Christian ; Gröschel, André H. ; Böhm, Marietta ; Müller, Axel H. E. ; Schmidt, Hans-Werner ; Ober, Christopher K.:
Tailored star-shaped statistical teroligomers via ATRP for lithographic applications.
In: Journal of Materials Chemistry. Bd. 22 (2012) Heft 1 . - S. 73-79.
ISSN 0959-9428
DOI der Verlagsversion: https://doi.org/10.1039/c1jm11922b

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Abstract

series of five star-shaped teroligomers consisting of a saccharose core, and arms, composed of α-gamma butyrolactone methacrylate (GBLMA), methyl adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) with defined arm length and number of arms were prepared via the core-first atom transfer radical polymerization (ATRP) route. The saccharose core was modified with ATRP initiating sites and non-reactive sites, enabling the synthesis of star polymers with a smaller arm number but identical core. Star teroligomers were synthesized with narrow molecular weight distributions with low polydispersity indices (PDIs < 1.1) showing negligible side reactions only at higher conversions of Xp > 50%. The absence of side reaction and the precise achievement of the target molecular weight indicated excellent control over the reaction. A selected star-shaped teroligomer was investigated for the first time as a photoresist material. The delicate conditions of the lithographic process were optimized by a combinatorial approach. The obtained low line edge and line width roughness of the observed pattern demonstrate the potential of the star architecture for this application.